Abstract
This paper presents a high order time discretization method by combining the time splitting method with semi-implicit spectral deferred correction method to simulate the molecular beam epitaxial growth models with and without slope selection. The original problem is split into linear and nonlinear subproblems. The Fourier spectral method is adopted for the linear part, and a second-order SSP-RK method together with the Fourier spectral method is used for the nonlinear part. The scheme takes advantage of avoiding nonlinear iteration. However, the temporal error is dominated by the operator splitting error, which is second order for Strang splitting. In order to achieve higher order numerical algorithm in time, we consider a semi-implicit spectral deferred correction (SDC) method to reduce the splitting error. Specifically, the temporal order is increased by one with each correction loop in the SDC framework. Numerical results are given to illustrate that the high order temporal algorithm is a practical, accurate and efficient simulation tool for molecular beam epitaxial growth models.
Keywords
Introduction
The molecular beam epitaxy (MBE) equation is a fourth-order nonlinear parabolic equation. Epitaxy is referred to the deposition of a crystalline overlayer on a substrate. MBE model is a high vacuum technique for the growth of epitaxial layers, usually semiconductors, that utilizes thermal beams of source atoms or molecules impinging on a single crystal substrate. It can produce many complex structures of varying layers that are further processed to produce a range of electronic and optoelectronic devices, including high speed transistors, high-efficiency solar cells, light-emitting diodes and solid state lasers. In the recent years, MBE equation becomes an important and challenging research topic in the material science which motivates people to develop mathematical models as well as simulation tools to understand the primary mechanisms behind the technology.
In this work, we consider a broadly-used continuum model for the MBE, which is derived via a L2-gradient flow associated with the energy
There are two popular choices of the nonlinear bulk potential:
(I) the logarithmic potential for the case without slope selection model
(II) the double well potential for the case of slope selection model
Due to the presence of the negative term, the energy
The
The initial condition of both models is
The periodic boundary condition is adopted here since it is usually used to remove all boundary integrals. As for the well-posedness and solution regularity of the initial-boundary-value problems of the above models, see literature.4–6
In the context of MBE, equation (3) selects the slope of the MBE surface and thus equation (5) is called the MBE model with slope selection, and correspondingly equation (4) is called the MBE model without slope selection. The interfacial dynamics governed by equations (4) and (5) are different. Solutions to equation (5) exhibit pyramidal structures, where the faces of the pyramids have slopes
The models (4) and (5) satisfy energy dissipative law and mass conservation
There have been many numerical studies on the MBE model: the convex splitting method Ju et al. 2017,3,9 the stabilization method Xu and Tang 2006, 6 the invariant energy quadratization (IEQ) method, 10 the scalar auxiliary variable (SAV) method11 adaptive time-stepping algorithms,12,13 exponential time difference (ETD) scheme 14 and so on. The operator splitting strategy is also a very effective numerical method to solve MBE model.15,16 The basic idea of the operator splitting method 17 is that the original problem is divied into subproblems which are simpler than the original problem. Then the approximate solution of the original problem is composed using the exact or approximate solutions of the subproblems in a given sequential order.
The spectral deferred correction (SDC) was first introduced by Dutt et al. 18 to solve the Cauchy problem for ODEs. The key idea of the SDC method is to convert the original ODEs into the corresponding Picard equation and then apply a deferred correction procedure in the integral formulation, driven by either the explicit or the implicit Euler marching scheme. An advantage of SDC method is that it is a one step method and possess favorable accuracy and stability properties even for versions with very high order of accuracy.
The motivation of this study is to an second-order operator splitting Fourier method combined with SDC method for MBE model. The MBE equation equation with or without slope selection was first divided into linear fourth order parabolic equation and nonlinear equation. The linear part was solved using Fourier spectral spatial discretization, and the nonlinear part was solved by the spectral method combined with a second-order SSP-RK method in time. Then, a semi-implicit spectral deferred correction (SDC) method is employed to improve the temporal accuracy. It is obvious that we can achieve high order accuracy in both time and space. Finally, we present numerical experiments demonstrating the convergence order and numerical properties of the proposed methods.
The outline of the paper is as follows. In Section 2, a fast explicit operator splitting spectral method for problem (1) is developed. In Section 3, a high order semi-implicit SDC method combining with the operator splitting spectral algorithm is introduced. In Section 4, the numerical results confirming the accuracy and efficiency of the obtained method are presented. Finally, conclusions are drawn in Section 5.
Fast explicit operator splitting method for MBE model
In this section, we present a fast explicit operator splitting method for MBE models (4) and (5). The proposed method is based on the operator splitting method that combines spatial discretization by Fourier spectral method with temporal discretization by the SSP-RK method. We restrict the description to two space dimension (2 D) for notational simplicity.
The operator splitting method for MBE models (4) and (5) are constructed as follows. Writing both equations in the following abstract initial value problem
Splitting the original models into two subequations
Then given a time step τ, the second-order Strang splitting method
17
reads as
Introducing the following spatial grid
The function u can be reconstructed via the corresponding inverse transform
Let
For any
Let
Thus
Now we give the numerical approximations
We first consider equation (7) subject to periodic boundary condition from tm to
By Parseval’s formula, it yields
Hence, we have the following lemma.
We now consider the nonlinear equation (8) subject to periodic boundary conditions. Based on the second order SSP-RK method,
20
equation (8) can be solved by
Define a mapping
Taking Fourier transform in both sides of the scheme (16) and combining with equation (12), we have the fully discrete scheme
Now we are in the position to give a second-order fast explicit operator splitting method. The whole procedures from tm to
SDC method for improving the temporal order of accuracy
The Algorithms 1 takes advantage of avoiding nonlinear iteration and reaching spectral accuracy in space. However, the temporal error is dominated by the operator splitting error. In order to achieve higher order numerical algorithm in time, we consider a semi-implicit SDC method to reduce the splitting error.
Suppose the time interval
A single time step of an SDC method begins by first dividing the time step
Algorithms 2
For
Numerical experiments
In this section, we perform a series of numerical experiments to demonstrate the accuracy and efficiency of the obtained numerical algorithm.
Problem 1: Convergence test
In order to show the order of convergence of the obtained method, we start with the study of the 2D case on
Since both models (4) and (5) exhibit the same behavior in a short time, we only consider the convergence of our method for model (4) in this problem.
We first consider the convergence order both in terms of L2- and
The computational results are presented in Table 1 for the MBE model without slope selection. One may see that the numerical orders of time accuracy is close to the optimal
Temporal accuracy for MBE without slope selection at T = 5 with N = 128 and P = 3 for Problem 1.
Secondly, we test the spatial errors by letting N vary and fixing K = 2 and M = 2000, which is large enough to avoid contamination of the temporal error. The error in the spatial direction as follows
The

Spatial L2 and
Problem 2: Growth dynamics
This example is to study the long time dynamical behavior of the MBE models (4) and (5). We take the same initial condition and boundary condition as in Problem 1. The simulation parameters are chosen as follows
The numerical results are shown in Figures 2 and 3. We see from Figure 2 that solutions to model (4) exhibit mound-like structures. There are many small hills (red part) and valleys (blue part) at the early period, while at the final time t = 400, the system saturates to a one-hill-one-valley structure. However, the interfacial dynamics in governed by equation (5) is different, see the Figure 3. The morphology of the growing interface is characterized by the development of pyramidal structures. These are induced by the presence of the slope selection in the model. The pyramidal structures are made of nearly flat facets that meet at sharp edges.

The numerical solutions at t = 10,50,100,200,400 for the MBE models (4).

The numerical solutions at t = 10,50,100,200,400 for the MBE models (5). (a) Mass for MBE without slope. (b) Energy for MBE without slope. (c) Mass for MBE with slope. (d) Energy for MBE with slope.
The time evolution of the energy E(t), and mass M(t) are presented in Figure 4, which show that the proposed method is mass conserving and energy decreasing when solving the MBE models.

The curves of mass and energy for Problem 2.
Problem 3: Coarsening dynamics
For the no-slope-selection MBE model (4), it is shown in Golubovic
8
that
However, for the slope-selection MBE model (5), it is shown in Moldovan and Golubović
7
that
Here the surface roughness R(t) is defined by
In order to study the energy decay rate and the surface roughness growth rate, we take an initial condition as
In Figures 5 and 6, the time evolution of the energy and roughness for models (4) and (5) are plotted respectively. For the MBE model (4), Figure 5(b) shows the linear fitting of the semi-log energy data up to t = 600, where the fitting line is

Time evolution of the energy (first line) and roughness (second line) for the MBE model without slope selection.

Time evolution of the energy (first line) and roughness (second line) for the MBE model with slope selection.
Conclusions
In this work, by a combination of the operator splitting method and SDC method, a high order operator splitting Fourier spectral scheme for the MBE model with and without slope selection were developed. The semi-implicit SDC method was employed to improve the temporal accuracy. Numerical experiments were presented to confirm the accuracy and efficiency of the method. Additionally, during the simulations for the coarsening process, it is clearly observed that the energy decay and roughness growth rates. In future work, we plan to to analyze the convergence rate of the method theoretically.
Footnotes
Declaration of Conflicting Interests
The author(s) declared no potential conflicts of interest with respect to the research, authorship, and/or publication of this article.
Funding
The author(s) disclosed receipt of the following financial support for the research, authorship, and/or publication of this article: ZF Weng is in part supported by the NSF of China (No. 11701197) and the Fundamental Research Funds for the Central Universities (No. ZQN-702) and YP Zeng was supported by Guangdong Basic and Applied Basic Research Foundation (Grant Nos. 2020A1515011032 and 2018A030307024) and SY Zhai is in part supported by the NSF of China (No. 11701196).
Research data
The data used to support the findings of this study are included within the article.
