Film damping caused by microfluids has important effects on the dynamic characteristics of moving elements of microelectromechanical system devices. There are two kinds of film damping existing in microelectromechanical system devices, for instance, slide film damping and squeeze film damping. This article presents an overview on the recent research progress on the slide film damping in microelectromechanical system devices. Based on the first slip velocity boundary conditions, this article discusses two kinds of damping models in detail, which commonly used to investigate on the slide film damping. For the convenience of quick reference in future, laterally moving microstructures, adequate important equations and applicable conditions are included in this article. Finally, we proposed two unified models for the analysis and design of laterally moving microstructured devices.
SomàADe PasqualeG. Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect. Analog Integr Circ S2008; 57(3): 213–224.
2.
SteenekenPGRijks ThGSMvan BeekJTM. Dynamics and squeeze film gas damping of a capacitive RF MEMS switch. J Micromech Microeng2005; 15(1): 176–184.
3.
WangWJiaJ. Analysis on microfluids squeezed film damping of perforated disks with a centre hole. In: Proceedings of ASME 2005 fluids engineering division summer meeting, Houston, TX, 19–23 June 2005, pp. 489–494. ASME.
4.
VeijolaTKuismaHLahdenperéiJ. Equivalent-circuit model of the squeezed gas film in a silicon accelerometer. Sensor Actuat A: Phys1995; 48(3): 239–248.
PanFKubbyJPeetersE. Squeeze film damping effect on the dynamic response of a MEMS torsion mirror. J Micromech Microeng1998; 8(3): 200.
7.
ChangK-MLeeS-CLiS-H. Squeeze film damping effect on a MEMS torsion mirror. J Micromech Microeng2002; 12(5): 556.
8.
VagiaMTzesA. Modeling and analysis of the squeezed film damping effect on electrostatic microactuators. In: Proceedings of 16th Mediterranean conference on control and automation, Ajaccio, France, 25–27 June 2008, pp.469–474. IEEE.
9.
WangW. Study on flow characteristics of microfluidics for MEMS design. Doctoral Dissertation, Xidian University, China, 2007.
10.
WuGXuDXiongB. Analysis of air damping in micromachined resonators. In: 7th IEEE international conference on nano/micro engineered and molecular systems (NEMS), Kyoto, Japan, 5–8 March 2012, pp.469–472. IEEE.
11.
LiW. Analytical modeling of ultra-thin gas squeeze film. Nanotechnology1999; 10: 440–446.
12.
BaoMYangHYinH. Energy transfer model for squeeze-film air damping in low vacuum. J Micromech Microeng2002; 12(3): 341.
13.
BaoMYangHSunY. Squeeze-film air damping of thick hole-plate. Sensor Actuat A: Phys2003; 108(1–3): 212–217.
14.
NayfehAIYounisMI. A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping. J Micromech Microeng2004; 14(2): 170.
15.
PandeyAKPratapRChauFS. Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures. Sens Actuat A: Phys2007; 135(2): 839–848.
16.
FengCZhaoY-PLiuDQ. Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration. Microsyst Technol2007; 13(7): 625–633.
17.
BaoaMYangH. Squeeze film air damping in MEMS. Sens Actuat A: Phys2007; 136(1): 3–27.
18.
PratapRMohiteSPandeyAK. Squeeze film effects in MEMS devices. J Indian I Sci2007; 87(1): 75–94.
19.
SumaliH. Squeeze-film damping in the free molecular regime: model validation and measurement on a MEMS. J Micromech Microeng2007; 17: 2231–2240.
20.
PandeyAKPratapR. A semi-analytical model for squeeze-film damping including rarefaction in a MEMS torsion mirror with complex geometry. J Micromech Microeng2008; 18(10): 105003.
21.
Altuğ BıçakMMRaoMD. Analytical modeling of squeeze film damping for rectangular elastic plates using Green’s functions. J Sound Vib2010; 329(22): 4617–4633.
22.
VagiaMTzesA. A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects. In: Proceedings of American control conference (ACC), Baltimore, MD, 30 June–2 July 2010, pp.3390–3402. IEEE.
23.
LeungRCheungHGangH. A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators. Microfluid Nanofluid2010; 9: 809–818.
24.
HongGYeW. A macromodel for squeeze-film air damping in the free-molecule regime. Phys Fluids2010; 22: 012001.
25.
ChoY-HKwakBMPisanoAP. Slide film damping in laterally driven microstructures. Sensor Actuat A: Phys1994; 40(1): 31–39.
26.
LeeKBChoY-H. Electrostatic control of mechanical quality factors for surface-micromachined lateral resonators. J Micromech Microeng1996; 6: 426–430.
27.
VeijolaTTurowskiM. Compact damping models for laterally moving microstructures with gas-rarefaction effects. J Microelectromechan S2001; 10(2): 263–273.
28.
ChenC-SChouC-F. Analytical and numerical studies on viscous energy dissipation in laterally driven microcomb structures. Int J Heat Mass Tran2003; 46(4): 695–704.
29.
OngkodjojoATayFEH. Slide film damping and squeeze film damping models considering gas rarefaction effects for MEMS devices. Int J Comput Eng Sci2003; 4(2): 401–404.
30.
WangWNiuXFanK. Stokes’ second problem with velocity slip boundary condition. Key Eng Mat2011; 483: 287–292.
31.
KhaledA-RAVafaiK. The effect of the slip condition on Stokes and Couette flows due to an oscillating wall: exact solutions. Int J Nonlin Mech2004; 39: 795–809.
