New approach suggesting a sensor selection procedure for hazardous substances used in the semiconductor industry

Abstract

This study has developed a sensor selection procedure for quickly confirming hazardous chemical exposure levels for electronics industry workers. We reviewed several papers and documents to determine the chemical substances used in semiconductor manufacturing. To source information about high-use and high-risk substances and the amounts of chemicals used in semiconductor manufacturing, we utilized chemical data from the Korea Ministry of the Environment and the Korea Occupational Safety and Health Agency. The method used to select chemicals involved assigning weights to hazardous substances and selecting those with high scores ultimately for the development of sensors. During the manufacturing of semiconductors, sensors are needed for hydrogen fluoride, chlorine, phosphine, carbon monoxide, hydrogen chloride, hydrogen peroxide and ammonia. Overall, the proposed procedure provides a practical and systematic framework for prioritizing hazardous chemicals and supporting sensor selection based on actual industrial usage and risk, thereby enhancing the applicability of real-time chemical monitoring in semiconductor manufacturing.

Keywords

Semiconductor sensor electronic industry hazardous substances safety and health

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