The performance of potassium dihydrogen phosphate optics in inertial confinement fusion devices is highly affected by its surface topography. This paper theoretically investigates the relationship between the air-induced vibration of aerostatic bearing and high-frequency ripples (amplitudes of around 12 nm, spatial periods in the range of 8–30 mm) on machined surface of potassium dihydrogen phosphate optics. A simulation model, which combines transient computational fluid dynamic analysis and transient dynamic analysis, is proposed to simulate the vibration of tool tip. The three-dimensional flow status of air film is studied based on large eddy simulation method, and air vortex shedding phenomenon is observed, which results in the dynamical change of air film force. The simulated vibration amplitudes of tool tip is 8 nm, and its spatial periods are in the range of 10–24 mm, which agree well with the measured data.
MosesEIBibeauCBonannoRE, et al.The National Ignition Facility: The world’s largest laser. Proc SPIE Int Soc Opt Eng2003; 5001: 1–15.
2.
NegresRAKucheyevSODemangeP, et al.Decomposition of KH2PO4 crystals during laser-induced breakdown. Appl Phys Lett2005; 86: 171107–171107-3.
3.
ChenWLuLLiangY, et al.Flatness improving method of KDP crystal in ICF system and its implementation in machine tool design. Proc IMechE, Part E: J Process Mechanical Engineering2014; 229: 1989–1996.
4.
SuRLiuHLiangY, et al.Mechanical and optical analysis of large-aperture optics mounted on a frame with a curved surface. Opt Laser Technol2014; 56: 189–195.
5.
ChenMPangQWangJ, et al.Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods. Int J Mach Tools Manuf2008; 48: 905–913.
6.
ChenWLiangYLuoX, et al.Multi-scale surface simulation of the KDP crystal fly cutting machining. Int J Adv Manuf Technol2014; 73: 289–297.
7.
LawsonJKAuerbachJMEnglishRE, et al.NIF optical specifications: The importance of the RMS gradient. Proc SPIE Int Soc Opt Eng1999; 3492: 336–343.
8.
ChenWLiangYSunY, et al.Investigation on the influence of machine tool dynamics on the wavefront gradient of KH2PO4 crystals. J Manuf Sci Eng2014; 136: 351–373.
9.
ArnesonDDorenMVBlystoneS, et al.Interferometric measurement of workpiece flatness in ultra-precision flycutting. Sensor Rev2006; 26: 209–217.
10.
KhanfirHBonisMRevelP. Improving waviness in ultra precision turning by optimizing the dynamic behavior of a spindle with magnetic bearings. Int J Mach Tools Manuf2005; 45: 841–848.
11.
WangWLiKYWangJ, et al.Analysis on dependence of phase matching angle on temperature in KDP crystal. Opt Laser Technol2011; 43: 683–686.
12.
LiKJiaHWangC, et al.Theory and experiment analysis of factors affecting THG efficiency for the TIL prototype laser facility. Optik Int J Light Electron Opt2009; 120: 1–8.
13.
AnCHZhangYXuQ, et al.Modeling of dynamic characteristic of the aerostatic bearing spindle in an ultra-precision fly cutting machine. Int J Mach Tools Manuf2010; 50: 374–385.
14.
LiangYChenWAnC, et al.Investigation of the tool-tip vibration and its influence upon surface generation in flycutting. Proc IMechE, Part C: J Mechanical Engineering Science2013; 228: 2162–2167.
15.
LiangYChenWSunY, et al.Dynamic design approach of an ultra-precision machine tool used for optical parts machining. Proc IMechE, Part B: J Engineering Manufacture2012; 226: 1930–1936.
16.
ChenMLiMChengJ, et al.Study on the optical performance and characterization method of texture on KH2PO4 surface processed by single point diamond turning. Appl Surf Sci2013; 279: 233–244.
17.
ChenWLiangYSunY, et al.Investigation of the influence of constant pressure oil source fluctuations on ultra-precision machining. Proc IMechE, Part B: J Engineering Manufacture2014; 229: 372–376.
18.
KimCJOhJSParkCH. Modelling vibration transmission in the mechanical and control system of a precision machine. CIRP Ann Manuf Technol2014; 63: 349–352.
19.
AoyamaTKakinumaYKobayashiY, et al.Numerical and experimental analysis for the small vibration of aerostatic guideways. CIRP Ann Manuf Technol2006; 55: 419–422.
20.
ChenXDHeXM. The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography. Tribol Int2006; 39: 1336–1341.
21.
ChenXChenHLuoX, et al.Air vortices and nano-vibration of aerostatic bearings. Tribol Lett2011; 42: 179–183.
22.
ChenDBianYZhouS, et al.Influence factor analysis for gas fluctuation of aerostatic guideway. J Mech Eng2014; 50: 97–103.
23.
LiYTLinYXZhuHX, et al.Research on the gas pressure fluctuation characteristics inside an aerostatic thrust bearing with a pocketed orifice-type restrictor. Tribol Trans2014; 57: 28–35.
24.
LiYTLinYXZhuHX, et al.Analysis of the micro self-vibration of aerostatic thrust bearing based on large eddy simulation. J Mech Eng2013; 49: 56–62.
25.
LiYZhaoJZhuH, et al.Numerical analysis and experimental study on the microvibration of an aerostatic thrust bearing with a pocketed orifice-type restrictor. Proc IMechE, Part J: J Engineering Tribolgy2014; 229: 609–623.
26.
ZhuJChenHChenX. Large eddy simulation of vortex shedding and pressure fluctuation in aerostatic bearings. J Fluids Struct2013; 40: 42–51.
27.
ChenXChenHZhuJ, et al.Vortex suppression and nano-vibration reduction of aerostatic bearings by arrayed microhole restrictors. J Vib Control2015; 32: 77–78.
28.
ChenWSunY. Influence of low-spatial frequency ripples in machined potassium dihydrogen phosphate crystal surfaces on wavefront errors based on the wavelet method. Opt Eng2015; 54: 024101–024101.
29.
ChenWLuLYangK, et al.An experimental and theoretical investigation into multimode machine tool vibration with surface generation in flycutting. Proc IMechE, Part B: J Engineering Manufacture2015; 230: 2439–2452.
30.
ChenWLiangYSunY, et al.A novel dynamic modeling method for aerostatic spindle based on pressure distribution. J Vib Control2014; 21: 3339–3347.
