A Theoretical and Experimental Study of the Vibratory Dynamics of High-Precision Optical Positioning Systems

Abstract

At the Advanced Photon Source (APS), a state-of-the-art synchrotron radiation facility at Argonne National Laboratory (ANL), high-precision optical positioning systems are needed to conduct a wide range of experiments using the high-brilliance X-ray beam. Precision may be compromised by low-level, low- frequency vibrations from flow-structure interactions in the cooling systems and from facility-based distur bances propagating through the floor. To predict the vibratory response of the positioning systems, a linearized multibody formulation has been developed. It has been applied to specific example cases—an optical table and a mirror support system—used at the experimental stations of the APS. Comparisons of resonant fre quency and mode shape predictions based on the theoretical formulation with experimental measurements il lustrate the crucial importance of properly modeling the kinematic joints and components that comprise these multibody structures. Improved experimental and theoretical methods have been introduced to estimate their dynamic properties. The results obtained by theory compare well with experimental findings. The proposed methodology is precise and generic in predicting the coupled multidimensional, multi-degree-of-freedom vi bratory motion of the positioning systems for the given positioning configurations. It is easily adaptable to numerous systems at the APS and similar facilities.

Keywords

High-precision positioning vibration control optical systems

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References

Anees, A. , 1995, "Interactive simulation-based optical system development ," SPIE Proceedings CR58, 220-248.

Baklakov, B.A. , Lebedev, P.K. , Parkhomchuk, V.V. , Seryi, A.A. , Sleptsov, A.I. , and Shil'tsev, V.D. , 1993, "Study of seismic vibrations for the VLEPP linear collider: Technical physics," Technical Physics 38, 894-898.

Basdogan, I. , Royston, T.J. , Barraza, J. , Shu, D. , and Kuzay, T. , 1997, "A theoretical and experimental study of the vibratory behavior of a high-precision optical positioning table," in Proceedings of the ASME Design Engineering Technical Conference , Sacramento, CA.

Basdogan, I. , Royston, T.J. , Shabana, A.A. , Shu, D. , and Kuzay, T. , 1996, "Vibratory response of a mirror support/positioning system for the Advanced Photon Source Project at Argonne National Laboratory ," SPIE Proceedings 2865, 1-14.

Brochet, A. and Bernard, J. , 1991, "Site selection and design of a low-vibration building for submicron technology applications," SPIE Proceedings 1619, 148-160.

Chen, J.C. and Garba, J. , 1979, "Analytical model improvement using modal test results ," AIAA Journal 18(6), 684-690.

Doyle, B.K. , 1993, "Design of optical structures for maximum fundamental frequency," SPIE Proceedings 1998, 50-59.

Doyle, B.K. , Cerrati, V.J. , Forman, S.E. , and Sultana, J.A. , 1995, "Optimal structural design of the airborne infrared imager ," SPIE Proceedings 2542, 11-22.

Dyck, H.M. , Berg, E. , and Harris, D. , 1986, "A study of microseismic and man-made vibrations on Mauna Kea," SPIE Proceedings 628, 162-169.

10.

Flugge, W. , 1962, Handbook of Engineering Mechanics, McGraw-Hill, New York.

11.

Harris, T.A. , 1984, Rolling Bearing Analysis, John Wiley , New York.

12.

Jendrzejczyk, J.A. , 1991, "Vibration considerations in the design of the Advanced Photon Source at Argonne National Laboratory," SPIE Proceedings , 1619, 114-126.

13.

Jennings, P.A. and Willson, J.W. , 1991, "Improved vibration isolation system for a scanning electron microscope," SPIE Proceedings 1619, 148-160.

14.

Laughlin, M.J. , 1995, "Mirror jitter: An overview of theoretical and experimental work," Optical Engineering 34(2), 321-329.

15.

Redding, D.C. and Breckenridge, W.G. , 1991, "Optical modeling for dynamics and control analysis," Journal of Guidance, Control, and Dynamics 14(5), 1021-1032.

16.

Royston, T.J. , 1998, "Vibration characteristics of an APS lab facility in building 401," Argonne National Laboratory, Light Source Notes, http://www.aps.anl.gov/techpubn/Isnotes/Is263/Is263.html .

17.

Royston, T.J. and Basdogan, I. , 1998, "Vibration transmission through self-aligning (spherical) rolling element bearings: Theory and experiment," Journal of Sound and Vibration 215(5), 997-1014.

18.

Shabana, A.A. , 1991, Theory of Vibration, Vol. 2, Springer-Verlag, New York.

19.

Shabana, A.A. , 1994, Computational Dynamics, Springer-Verlag , New York.

20.

Shu, D. and Barraza, J. , 1996, "Low profile, high load vertical rolling positioning stage ," U.S. patent #5, 5426, 903, June 18.

21.

Shu, D. , Benson, C. , Chang, J. , Barraza, J. , Kuzay, T M., Alp, E.E. , Sturhan, W. , Lai , B. , McNulty, I. , Randall, K. , Srajer, G. , Xu , Z. , and Yun, W. , 1997, " Mirror mounts designed for the Advanced Photon Source SRI-CAT," in Proceedings of SRI'97, Cornell University, New York.

22.

Slocum, A.H. , 1991, Precision Machine Design, Prentice Hall, Englewood Cliffs, NJ.

23.

Thomson, W.T. , 1981, Theory of Vibration With Applications, Prentice Hall, Englewood Cliffs, NJ.