Piezoelectric ultrasonic motors are a new type of actuator. They are characterized by high torque at low rotational speed, simple mechanical design and good controllability. They also provide a high holding torque even if no power is applied. Compared to electromagnetic actuators the torque per volume ratio of piezoelectric ultrasonic motors can be higher by an order of magnitude. Recently various types of piezoelectric ultrasonic motors have been developed for industrial applications such as cameralens drive or as actuator in the head restraint of automobile seats. This paper describes several types of piezoelectric ultrasonic motors. In the first part the working principle of the travelling wave motor is explained. In the second part other types of piezoelectric ultrasonic motors are described and classified with respect to the vibration modes and contact mechanisms used in their design. Finally some open problems in piezoelectric ultrasonic motor research are addressed.
Get full access to this article
View all access options for this article.
References
1.
Akiyama, Y.1987. "State of Ultrasonic Motors in Japan", Journal of Electrical Engineering, 4:76-80.
2.
Anon. Swingender Ring. m+w 7/1990-Konstruktion and Entwicklung, 3:40-47.
3.
Aoyama, M. , K. Hirao, N. Takeda, S. Sagara, H. Ohta and M. Kuratsubo. 1992. "Ultrasonic Motor for Adjusting the Head Restraint of Automobile Seats", Proc. of the society of Automotive Engineers of Japan Meeting, pp. 61-64.
4.
Barth, H. V.1973. "Ultrasonic Driven Motor", IBM Technical Disclosure Bulletin, 16(7):2236-2236.
5.
Chen, P., P. Hagedorn and J. Wallaschek. Der Ultraschall-Wanderwellenmotor, neue Ergebnisse. Proc. Fachtagung Integrierte mechanisch-elektronische Systeme, Darmstadt 1993, VDI-Fortschritt-Berichte Reihe 12, Nr. 179, R. Isermann, ed., pp. 157-167.
6.
Crawley, E. F. and J. De Luis. 1987. "Use of Piezoelectric Actuators as Elements of Intelligent Structures", AIAA Journal, 25(10):1373-1385.
7.
Fleischer, M. , D. Stein and H. Meixner. 1989. "A New Type of Piezoelectric Ultrasonic Motor", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 36(6):614-619.
8.
Flynn, A. M. et al. "Piezoelectric Micromotors for Microrobots", IEEE 1990 Ultrasonics Symposium.
9.
Furuya, S. S. , T. Maruhashi, Y Izuno and M. Nakaoka. 1992. "Load-Adaptive Frequency Tracking Control Implementation of Two-Phase Resonant Inverter for Ultrasonic Motor", IEEE Transactions on Power Electronics, 7(3):542-550.
10.
Hagedorn P. , W. Konrad and J. Wallaschek. 1993. "Travelling Wave Ultrasonic Motors, Part H: A Numerical Method for the Flexural Vibrations of the Stator,"Journal of Sound and Vibration, 168(1):115-122.
11.
Hagedorn, P. and J. Wallaschek. 1993. "Travelling Wave Ultrasonic Motors, Part I: Working Principle and Mathematical Modelling of the Stator", Journal of Sound and Vibration155(1):31-46.
12.
Herzog, B. 1993. Entwicklungsgrundlagen fur modulare Ultraschallantriebe. Dissertation Universitat Sttugart.
13.
Hirata, H. and S. Ueha. 1992. "Revolution Speed Characteristics of an Ultrasonic Motor Estimated from the Pressure Distribution of the Rotor", Japanese Journal of Applied Physis, 31(31-1):248-250.
14.
Inaba, R. , A. Tokushima, O. Kawasaki, Y. Ise and H. Yoneno. 1987. "Piezoelectric Ultrasonic Motor", IEEE 1987 Ultrasonics Symposium, pp. 747-756.
15.
Ishida, M. , J. Hamaguchi, K. Shirasuka and T. Hori. 1992. "A New Friction-Type Piezoelectric Motor Utilizing Mechanism of the Strain Wave Gearing", IEEE Transactions on Industrial Electronics, 39(1):30-35.
16.
Iwamatsu, S. , S. Ueha, M. Kuribayashi and E. Mori. 1986. "Rotary Ultrasonic Motor Using Extensional Vibrations of a Ring", Japanese Journal of Applied Physics, 25(25-1):174-176.
17.
Kawamura, A. , Y. Nagayama and T. Yamazaki. 1991. "Multi-Degree-of Motion Freedom Ultrasonic Piezoelectric Actuator".
18.
Kumada, A.1985. "A Piezoelectric Ultrasonic Motor", Japanese Journal of Applied Physics, 24(24-2):739-741.
19.
Kuribayashi, M. , S. Ueha and E. Mori. 1985. "Excitation Conditions of Flexural Travelling Waves for a Reversible Ultrasonic Linear Motor", Journal of the Acoustical Society of America, 77(4):1431-1435.
20.
Kurosawa, M. , K. Nakamura, T. Okamoto and S. Ueha. 1989. "An Ultrasonic Motor Using Bending Vibrations of a Short Cylinder", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 36(5):517-521.
21.
Lavrinenko, V. , I. A. Kartaschew and V. C. Wischnewski. 1980. Piezoelectric Motors (in Russian), Energia, Moscow.
22.
Lee, A. P. , P. B. Ljung and A. P. Pisano. 1992. "Polysilicon Micro Vibromotors", IEEE Micro Electro Mechanical Systems, Travemunde, February 4-7, 1992, pp. 177-182.
23.
Mori, K., H. Hirai and I. Kobayashi. 1988. "Actuator which Drives a Driven Member by Using Piezo-Electric Elements", European Patent Application EP 0297 574 A2.
24.
Nakamura, K. , M. Kurosawa and S. Ueha. 1989. "Characteristics of a Hybrid Transducer Type Ultrasonic Motor", 13th International Congress on Acoustics, Yugoslavia, pp. 425-428.
25.
Ohnishi, K. , K. Naito, T. Nakazawa and K. Yamakoshi. 1991. Journal of the Acoustical Society of Japan, 47:27-34.
26.
Okamura, I. 1992. "A Designing Method of a Bar-Type Ultrasonic Motor for Autofocus Lenses. Private Communication.
27.
Okamura, I. and H. Mukohjima. 1987. "Optimized Ultrasonic Motor Achieves 36% Efficiency Driving Camera's Autofocus Lens", PCIM, pp. 67-71.
28.
Sashida, T.1982. "Trial Construction and Operation of an Ultrasonic Vibration Driven Motor (in Japanese)", Oyo Butun, 51:713-720.
29.
Schadebrodt, G. and B. Salomon. 1989. Der Piezo-Wanderwellenmotorein neues Antriebselement in der Aktorik. 24. Technisches Presse-Kolloquium der AEG.
30.
Shimizu, H., S. Sugawara, T. Takada and S. Ishibashi. 1988. "Piezoelectrically Driving Device", US. Patent Number 4742 260.
31.
Tomikawa, Y. and T. Ogasawara. 1989. 'Ultrasonics Motor-Constructions/Characteristics/Applications", Ferroelectrics, 91:163-178.
32.
Tomikawa, Y. , T. Takano and H. Umeda. 1992. "Thin Rotary and Linear Ultrasonic Motors Using a Double-Mode Piezoelectric Vibrator of the First Longitudinal and Second Bending Modes", Japanese Journal of Applied Physics, 31:3073-3076.
33.
Tzou, H. S.1993. "Piezoelectric Shells. Distributed Sensing and Control of Contima", Kluwer Academic Publishers.
34.
Uchiki, T. , T. Nakazawa, K. Nakamura, M. Kurosawa and S. Ueha. 1991. "Ultrasonic Motor Utilizing Elastic Fin Rotor".
35.
Umeda, M. et al. 1990. "Positioning Characteristics of Ultrasonic Rotary Actuator with Two Mode Operation", IEEE 1990 Ultrasonics Symposium, pp. 1201-1204.
36.
Wallaschek, J. 1994. "Travelling Wave Ultrasonic Motors-Novel Mechatronic Drive Systems", Proc. of 1. Mathmod.I. Troch and F. Breitenecker, eds., Vienna.
37.
Wang, B. T. and C. A. Rogers. 1991. "Modelling of Finite-Length Spatially Distributed Induced Strain Actuators for Laminate Beams and Plates", Journal of Intelligent Material Systems and Structures, 2:38-58.
38.
Williams, A. and W. Brown. 1942. "Pizoelectric Motor", US-Patent 2 439 499.
39.
Wischnewski, V. C. et al. 1975. Elektrischer Motor. Deutsches Patent, Offenlegungsschrift DE 2530045 C 2.
40.
Yamayoshi, Y. and S. Hirose. 1992. "Ultrasonic Motor Not Using Mechanical Friction Force", International Journal of Applied Electromagnetics in Materials3 pp. 179-182.
41.
Zemella, R. J. 1990. "Design and Development of a Linear Travelling Wave Motor", Thesis, MIT
