In recent decades, various single-phase drive ultrasonic motors have emerged, and only a single excitation signal is used in their working states. Single-phase driven ultrasonic motors have the benefits of most ultrasonic motors, as well as the advantages of a simple driving circuit construction, low cost, high design flexibility, and high reliability, among others. According to the working principles, they are divided into three types: the vibration mode alternating type, the vibration mode coupling type, the vibration mode converting type. This paper summarizes various types of single-phase ultrasonic motors. The three types of the working principles and its representative structures are explained; output performances of the single-phase ultrasonic motors are described; then, practical and potential applications of the single-phase ultrasonic motors are introduced; finally, the research of single-phase ultrasonic motors are reviewed, and its development prospect is prospected. This review is helpful for a comprehensive understanding of single-phase drive ultrasonic motors. This paper offers the groundwork for the development of a novel single-phase driven ultrasonic motor with improved mechanical output.
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