A review of charge methods for driving piezoelectric actuators

Abstract

Piezoelectric actuators are the most commonly used actuators in nanopositioning. They provide excellent operating bandwidth and precision. These actuators are normally driven by voltage amplifiers; however, the relationship of the applied voltage on the actuator and its position is nonlinear and complex due to phenomena such as hysteresis. This adversely influences actuator’s position control which is the core component of nanopositioning. However, the electrical charge applied on a piezoelectric actuator has a significantly less complex relationship with its position. As a result, driving piezoelectric actuators with charge amplifiers has attracted significant attention. In this article, charge driving methods are classified, and their advantages, major issues and the solutions to these issues are critically reviewed.