This article presents the dynamic modeling of a three degree of freedom nanopositioning platform driven by three parallel piezoelectric actuators. The dynamics of the platform are formulated through the equations of rigid body motion, and then the stiffness of the actuators is included to form the full equations of motion. From a control perspective, the location of the sensors is important as they affect the output equation of the system. Hence, three different cases are analyzed with respect to their input–output characteristics in terms of their Bode plots. Finally, the H∞ loop shaping feedforward/feedback control design is shown and demonstrated via simulation for tracking a step signal.
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