To address the challenges of low efficiency, complex processes, and poor reproducibility in traditional ZnO thin-film fabrication methods, this study developed a novel chemical vapor deposition (CVD) apparatus capable of rapidly fabricating ZnO thin films. The ZnO thin-film gas sensors demonstrated remarkable performance, including a response time of 28 s, a recovery time of 7 s, and a limit of detection (LoD) as low as 0.78 ppm for acetone vapor. The sensors also exhibited high sensitivity, with a maximum response value (Ra/Rg) of 13 for acetone at 100 ppm and an optimal operating temperature of 300°C. The main novelty of this work lies in the ultra-fast fabrication process, achieving high-quality ZnO thin films within 10 min, combined with the optimization of precursor formulations to enhance gas-sensing performance. This study provides a significant advancement in ZnO thin-film fabrication, paving the way for practical applications in environmental monitoring and industrial safety.
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