A package for the analysis and design of piezoresistive pressure sensors has been developed. The finite-element analysis of the sensing diaphragm is based on Mindlin plate theory. The program is user friendly and can be used to determine the sensitivity and the nonlinearity of the device. It has been developed to run on an IBM compatible personal computer.
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Mirza, M.K. and Abdullah, F.1988. Nonlinear Finite-Element Package for the Analysis of Piezoresistive Pressure Sensors, Internal Report, Dept of Physics, City University, London.
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