A robust and practical force control system is crucial to the sensitive piezo-driven micromanipulation applications. This paper presents a new model-free robust finite-time force tracking controller for piezoelectric actuators (PEAs). The proposed controller composes of three intuitive terms: (1) a time-delay estimation (TDE) term that eliminates the requirement of detailed information about the PEA system, realizing model-free control; (2) a fast integral terminal sliding mode-based desired error dynamics injection term that ensures fast convergence and high tracking precision; (3) a correcting term based on adaptive fuzzy logic system that compensates for TDE errors caused by discontinuous nonlinearities and improves the robustness of the system. Force differential signal used in the controller is estimated online by a force state estimator. Stability of the closed-loop system and finite-time convergence are analyzed in theory. Comparative experiments are carried out on a PEA system with two superposed PEAs. Results show that the proposed control strategy has faster convergence, higher tracking accuracy and stronger robustness compared with the traditional TDE-based force controllers.
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