TCAD tools in undergraduate studies: A laboratory work for learning deep submicron CMOS processes

Abstract

This article discusses one exemplary and one original laboratory work from the micro- and nano-electronics manufacturing process laboratory works cycle. These laboratory works have been successfully introduced into the undergraduate programme and have been attended by students for several years at Vilnius Gediminas Technical University, Faculty of Electronics. This laboratory work is unique in that it consistently displays and graphically depicts practically all CMOS transistor manufacturing processes: from the preparation of the silicon wafer to the final passivation. Silvaco TCAD tools are used in order to simulate these technological processes. This type of laboratory works provides students with the necessary knowledge of chip manufacturing processes and TCAD tools without the use of costly manufacturing equipment specific to each technological process in the fabrication chain, long-term experiments and a large amount of human resources. This article also presents and discusses student feedback statistics over several years of studies, the advantages of this laboratory work, recommendations for further improvement and formulates conclusions.