In this paper, DLC films are produced by DC-pulsed plasma enhanced CVD after oxynitride-treating of Vanadis 8 tool steel. The experimental parameters include various Ar gas flows (1, 1.5, 2 and 2.5 sccm) with asymmetric bipolar pulsed voltages, the gas flow of CH4 and a deposition time of 90 min, respectively. The experimental results showed that optimal properties occurred at an appropriate argon gas flow of 1.5 sccm. The wear tests showed the lowest wear loss volume when loads of 2 and 5 N were 3.81 × 10−3 and 4.01 × 10−3 mm3, respectively. Meanwhile, the hardness of the DLC film was 17.78 GPa and the elastic modulus was 191.63 GPa, respectively. Moreover, the water contact angle was 78.11°, which indicated that the DLC films could make Vanadis 8 tool steel more hydrophobic.
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