Copper oxide (CuO) thin films were deposited by spray pyrolysis technique on glass substrates heated to 300°C. The effect of films thickness on the electrical characteristics (resistivity, free carrier concentration and Hall mobility of carriers) and morphological properties of CuO have been investigated. The obtained results indicate that the thickness increasing (longer periods of deposition time) have permitted the improvement of electrical characteristics of our films (decrease of the resistivity, increase of the free carriers concentration and the carriers Hall mobility). Scanning electron microscopy images of the samples prove that the films morphology change according to the film thickness and also show more homogeneity of CuO thin film grown at higher thicknesses.
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