Tantalum coating for bio-medical applications is prepared by atmospheric pressure chemical vapour deposition in a TaF5–H2 system on the inner wall of a stainless steel tube. The concentration of hydrogen fluoride (HF) has a significant effect on the morphology and crystallographic orientation of the tantalum coating. As the HF concentration increases, the tantalum coating gradually becomes smooth from roughness. The rougher part and the smoother part of tantalum coating reveal (200) and (110) preferred orientation, respectively. Simultaneously, the kinetic equation containing HF concentration has been developed. The calculated results from the equation show a good correspondence with the experimental results. The performance of tantalum coating with distinct morphologies on the effect of osseointegration was studied by implanting samples in vivo. The coating with a rougher surface was more osteoattractive than the one with a smoother surface.
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