VCN films with various carbon contents were deposited by reactive magnetron sputtering. The elemental compositions, microstructure, mechanical and tribological properties were investigated by X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), energy-dispersive spectrometer, scanning electron microscope (SEM), nano-indentation and friction and wear test. The results showed that the microstructure, mechanical properties and tribological properties of VCN films were influenced by the variation of the carbon content. The VCN films exhibited a face-centered cubic (fcc) structure. By increasing of carbon content of the film, the grain size of VCN films decreases gradually. The hardness of the films first increased and then decreased with increasing carbon content, after reaching the maximum values of 28.1 GPa, at 16.89 at.-% carbon. The average friction coefficient and wear rate decreased with the increasing carbon content at room temperature.
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