The new generation of analytical electron microscopes with aberration correction and new EDX detectors provide improved possibilities for microanalysis. Here, we apply a new approach to quantitative EDX based on using partial cross sections. Our quantification method is applied to alloy PtCo nanoparticles, which have been acid leached to provide Pt enrichment or rather Co depletion at the particle surface. Such surface Co depletion is absent at the vertices of the more facetted nanoparticles. The leaching process demonstrates very little change in Co composition when investigating the whole particle but produces a localised surface depletion, which can only be determined by the high-resolution EDX elemental maps.
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