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1-4 of 4 results for micromachining compensation

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Research article

First published 2008-6

Experimental study of compensation for the effect of temperature on a silicon micromachined gyroscope

X-H Zhu, H-J Chu, Q Shi [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

Open access

Research article

First published 2015-4

Alberto Borboni, Francesco Aggogeri, Angelo Merlo [...]

International Journal of Advanced Robotic Systems

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Research article

First published 2000-3

E I Gaura, R J Rider, N Steele

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

Free access

Research article

First published 2011-7

M Shayan, B Arezoo, A Sadough Vanini [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture