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Restricted accessResearch articleFirst published December, 2024

Observable responses of micro-cantilever array to dynamic acoustic forces at higher mode in the broadband frequency window

Cagri Yilmaz, Ramazan Sahin, Eyup Sabri Topal

Proceedings of the Institution of Mechanical Engineers,Part E: Journal of Process Mechanical Engineering

Restricted accessResearch articleFirst published February, 2012

Study of fringing effects in multi-cantilever HEMT-based resonant MEMS

Ryosuke Yamase, Takao Maeda, Irina Khmyrova [...]

International Journal of Applied Electromagnetics and Mechanics

Free accessResearch articleFirst published May, 2022

Fabrication of micro-mechanical planar cantilever beam-mass structures on quartz substrates using an ECDM process

Saranya Sambathkumar, Ravi Sankar Arunagirinathan

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Restricted accessResearch articleFirst published September, 2011

Development of 2D Microdisplay Using an Integrated Microresonating Waveguide Scanning System

Wei-Shu Hua, Wei-Chih Wang, Wen-Jong Wu [...]

Journal of Intelligent Material Systems and Structures

Restricted accessResearch articleFirst published November, 2020

Geometry and thickness dependant anomalous mechanical behavior of fabricated SU-8 thin film micro-cantilevers

Aviru Kumar Basu, Anup Basak, Shantanu Bhattacharya

Journal of Micromanufacturing

Search results

Articles (5)

Journals (0)

1-5 of 5 results for micro-cantilever array

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Sort by:

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Restricted accessResearch articleFirst published December, 2024

Observable responses of micro-cantilever array to dynamic acoustic forces at higher mode in the broadband frequency window

Cagri Yilmaz, Ramazan Sahin, Eyup Sabri Topal

Proceedings of the Institution of Mechanical Engineers,Part E: Journal of Process Mechanical Engineering

Restricted accessResearch articleFirst published February, 2012

Study of fringing effects in multi-cantilever HEMT-based resonant MEMS

Ryosuke Yamase, Takao Maeda, Irina Khmyrova [...]

International Journal of Applied Electromagnetics and Mechanics

Free accessResearch articleFirst published May, 2022

Fabrication of micro-mechanical planar cantilever beam-mass structures on quartz substrates using an ECDM process

Saranya Sambathkumar, Ravi Sankar Arunagirinathan

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Restricted accessResearch articleFirst published September, 2011

Development of 2D Microdisplay Using an Integrated Microresonating Waveguide Scanning System

Wei-Shu Hua, Wei-Chih Wang, Wen-Jong Wu [...]

Journal of Intelligent Material Systems and Structures

Restricted accessResearch articleFirst published November, 2020

Geometry and thickness dependant anomalous mechanical behavior of fabricated SU-8 thin film micro-cantilevers

Aviru Kumar Basu, Anup Basak, Shantanu Bhattacharya

Journal of Micromanufacturing