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1-2 of 2 results for hot-wire chemical vapor deposition

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Research article

First published 2013-6

Red emission from nano-silicon nitride multilayer films prepared using hot-wire chemical vapor deposition

Ashish K Panchal, Dharmendra Kumar R Rai, Chetan S Solanki

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2023-1

Ming Lu, Hua Wang, Xin Song [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture