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1-2 of 2 results for electrostatic chuck

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Select article: Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks

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Research article

First published January, 2019

Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks

Kesheng Wang, Yijia Lu, Jia Cheng [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

Select article: FEA-based optimal design of special suction cups temperature-controlled coatings

Open access

Research article

First published July, 2025

FEA-based optimal design of special suction cups temperature-controlled coatings

Diqing Fan, Jianyu Liu, Shuo Zhang [...]

Science Progress

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