Search results

Articles (2)

Journals (0)

1-2 of 2 results for electrostatic chuck

Sort by:

Relevance

Select all

Sort by:

Relevance

Retricted access

Research article

First published 2019-1

Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks

Kesheng Wang, Yijia Lu, Jia Cheng [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

Open access

Research article

First published 2025-7

Diqing Fan, Jianyu Liu, Shuo Zhang [...]

Science Progress