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Research article

First published 2007-6

Superhydrophobic surfaces by dynamic nanomasking and deep reactive ion etching

Ying Song, Min Zou

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2017-12

Effects of deep reactive ion etching parameters on etching rate and surface morphology in extremely deep silicon etch process with high aspect ratio

Tiantong Xu, Zhi Tao, Hanqing Li [...]

Advances in Mechanical Engineering

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Research article

First published 2015-3

A study on the deep etching and ohmic contact process of 6H-SiC high-temperature pressure sensor

Fei Tang, Ximin Ma, Xiaohao Wang

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2010-7

Characterization of sidewall roughness for silicon microstructures in micro actuator

Guoqiang Han, Zhuangde Jiang, Weixuan Jing [...]

International Journal of Applied Electromagnetics and Mechanics

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Research article

First published 2006-9

Novel die-sinking micro-electro discharge machining process using microelectromechanical systems technology

J-B Li, K Jiang, G J Davies

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2007-2

The development of a novel Bio-MEMS filtration chip for the separation of specific cells in fluid suspension

M Prince, X Ma, P Docker [...]

Proceedings of the Institution of Mechanical Engineers,Part H: Journal of Engineering in Medicine

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Research article

First published 1997-02

Fabrication Methods for High Aspect Ratio Microstructures

Satori Watanabe, Masayoshi Esashi, Yoshio Yamashita

Journal of Intelligent Material Systems and Structures

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Research article

First published 2022-7

Transparency and icephobicity of moth eye-inspired tailored omniphobic surface

Thanh-Binh Nguyen

Surface Engineering

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Research article

First published 2023-5

Study of metal-assisted chemical etching of silicon as an alternative to dry etching for the development of vertical comb-drives

Varun P. Sharma, Rahul Shukla, C. Mukherjee [...]

Journal of Micromanufacturing

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Research article

First published 2008-1

Design and fabrication of a micromachined electrostatically suspended gyroscope

B Damrongsak, M Kraft, S Rajgopal [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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