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Research article

First published 2011-7

Silicon (100) undercutting modelling and corner compensation structures design in wet anisotropic etching process

M Shayan, B Arezoo, A Sadough Vanini [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2023-5

Study of metal-assisted chemical etching of silicon as an alternative to dry etching for the development of vertical comb-drives

Varun P. Sharma, Rahul Shukla, C. Mukherjee [...]

Journal of Micromanufacturing

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Research article

First published 2025-2

Electrochemical polishing of TC4 titanium alloy with passivation film protection

Ning Ma, Yuanzhuo Peng, Yang Chen [...]

Surface Engineering

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Research article

First published 1998-09

Stacking Technology for a Space Constrained Microsystem

M. Heschel, J. F. Kuhmann, S. Bouwstra [...]

Journal of Intelligent Material Systems and Structures

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Research article

First published 2017-1

Influence of micro and nano-scale roughness on hydrophobicity of a plasma-treated woven fabric

Sohyun Park, Jooyoun Kim, Chung Hee Park

Textile Research Journal

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Research article

First published 2010-9

Applications of Microstructured Silicon Wafers as Internal Reflection Elements in Attenuated Total Reflection Fourier Transform Infrared Spectroscopy

Henrik Schumacher, Ulrich Künzelmann, Boris Vasilev [...]

Applied Spectroscopy

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Research article

First published 2012-1

A Design-Oriented Experimental Module for Teaching Micro- and Nanotechnologies to Mechanical Engineering Students

Wei Xue

International Journal of Mechanical Engineering Education

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Research article

First published 2013-12

A single-walled carbon nanotube thin film solar microcell with V-groove array structure

Yiyang Chang, Peng Liu, Jinwen Zhang

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2008-5

Mechanical properties of diamond thin films quantitative measured by means of blister test

D. H. Xiang, M. Chen, Y. P. Ma [...]

Surface Engineering

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