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Articles (31)

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1-10 of 31 results for X-ray lithography

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Select article: FT-IR Study of a Chemically Amplified Resist for X-ray Lithography

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Research article

First published 2003-7

FT-IR Study of a Chemically Amplified Resist for X-ray Lithography

T. L. Tan, V. A. Kudryashov, B. L. Tan

Applied Spectroscopy

Select article: Study of a Chemically Amplified Resist for X-Ray Lithography by Fourier Transform Infrared Spectroscopy

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Research article

First published 2004-11

Study of a Chemically Amplified Resist for X-Ray Lithography by Fourier Transform Infrared Spectroscopy

T. L. Tan, D. Wong, P. Lee [...]

Applied Spectroscopy

Select article: Fabrication of microfluidic channel of polydimethylsiloxane using X-ray lithography and its surface nanostructuring

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Research article

First published 2022-11

Fabrication of microfluidic channel of polydimethylsiloxane using X-ray lithography and its surface nanostructuring

Puspen Mondal, Shweta Saundarkar, Nitin Khantwal [...]

Journal of Micromanufacturing

Select article: Optimum collimator for proximity X-ray lithography Theoretical analysis

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Research article

First published 1998-8

Optimum collimator for proximity X-ray lithography Theoretical analysis

Igor A. Artioukov, Igor V. Kozhevnikov, Nataliya I. Kozhevnikova

Journal of X-Ray Science and Technology

Select article: Power Loading Limitations in Soft X-Ray Projection Lithography

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Research article

First published 1994-8

Power Loading Limitations in Soft X-Ray Projection Lithography

A. M. Hawryluk, N. M. Ceglio

Journal of X-Ray Science and Technology

Select article: Wafer Cost Analysis for a Soft X-Ray Projection Lithography System

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Research article

First published 1992-8

Wafer Cost Analysis for a Soft X-Ray Projection Lithography System

N. M. Ceglio, A. M. Hawryluk

Journal of X-Ray Science and Technology

Select article: Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF

Open access

Research article

First published 2014

Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF

Xuepeng Gong, Qipeng Lu, Zhongqi Peng

Advances in Mechanical Engineering

Select article: Non-astigmatic imaging with matched pairs of spherically bent crystals or reflectors

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Research article

First published 2009-5

Non-astigmatic imaging with matched pairs of spherically bent crystals or reflectors

M. Bitter, K.W. Hill, F. Jones [...]

Journal of X-Ray Science and Technology

Select article: Diffraction-Limited Large X-Ray Optics

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Research article

First published 1994-5

Diffraction-Limited Large X-Ray Optics

Eberhard Spiller

Journal of X-Ray Science and Technology

Select article: Applications and Measurements of Polycapillary X-Ray Optics

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Research article

First published 1996-2

Applications and Measurements of Polycapillary X-Ray Optics

C. A. MacDonald

Journal of X-Ray Science and Technology

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