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1-2 of 2 results for Scanning beam interference lithography

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Select article: Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

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Research article

First published August, 2018

Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

Sen Lu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

Select article: Study of a Chemically Amplified Resist for X-Ray Lithography by Fourier Transform Infrared Spectroscopy

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First published November, 2004

Study of a Chemically Amplified Resist for X-Ray Lithography by Fourier Transform Infrared Spectroscopy

T. L. Tan, D. Wong, P. Lee [...]

Applied Spectroscopy

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