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Research article

First published 2018-8

Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

Sen Lu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2004-11

T. L. Tan, D. Wong, P. Lee [...]

Applied Spectroscopy