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Research article

First published 2006-8

Process limitations of magnetically enhanced reactive ion etch equipment

B. Kim, J. Y. Park, S. J. Hong

Surface Engineering

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Research article

First published 2007-6

Superhydrophobic surfaces by dynamic nanomasking and deep reactive ion etching

Ying Song, Min Zou

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2005-10

Oxide via hole formation using magnetically enhanced reactive ion etching

B. Kim, J. Park

Surface Engineering

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Research article

First published 1997-11

Photoreflectance characterisation of Ar + ion etched and SiCI 4 reactive ion etched silicon (100)

M. Murtagh, S. M. Lynch, P. V. Kelly [...]

Materials Science and Technology

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Research article

First published 1992-7

Ion–surface interactions: From sputtering to reactive ion etching

C. Steinbruchel

Materials Science and Technology

Open access

Research article

First published 2017-12

Effects of deep reactive ion etching parameters on etching rate and surface morphology in extremely deep silicon etch process with high aspect ratio

Tiantong Xu, Zhi Tao, Hanqing Li [...]

Advances in Mechanical Engineering

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Research article

First published 2015-3

A study on the deep etching and ohmic contact process of 6H-SiC high-temperature pressure sensor

Fei Tang, Ximin Ma, Xiaohao Wang

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 1995-1

Influence of CH 4 /H 2 reactive ion etching on electrical and optical properties of AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures

C. M. van Es, T. J. Eijkemans, J. H. Wolter [...]

Materials Science and Technology

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Research article

First published 2010-7

Characterization of sidewall roughness for silicon microstructures in micro actuator

Guoqiang Han, Zhuangde Jiang, Weixuan Jing [...]

International Journal of Applied Electromagnetics and Mechanics

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Research article

First published 2006-9

Novel die-sinking micro-electro discharge machining process using microelectromechanical systems technology

J-B Li, K Jiang, G J Davies

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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