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1-4 of 4 results for Photoresist stripping

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Select article: Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum

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Research article

First published 1976-9

Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum

E. O. Degenkolb, C. J. Mogab, M. R. Goldrick [...]

Applied Spectroscopy

Select article: Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. II. Visible Spectrum

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Research article

First published 1977-3

Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. II. Visible Spectrum

J. E. Griffiths, E. O. Degenkolb

Applied Spectroscopy

Select article: Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists

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Other

First published 1977-1

Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists

E. O. Degenkolb, J. E. Griffiths

Applied Spectroscopy

Select article: Citric acid-modified carbon chemical filtration for cleanroom air quality control: Study on N-methyl-2-pyrrolidone and the interference of co-existing toluene

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Research article

First published 2016-8

Citric acid-modified carbon chemical filtration for cleanroom air quality control: Study on N-methyl-2-pyrrolidone and the interference of co-existing toluene

Tse-Ting Tu, Mengshan Lee, Shih-Tiz Kuo [...]

Indoor and Built Environment

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