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1-6 of 6 results for PLASMA ETCH PREDICTION

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Restricted accessResearch articleFirst published February, 2004

Plasma Etch Prediction Using Genetic Algorithm Based Polynomial Neural Network

D.-W. Kim, B. Kim, I.-J. Shim [...]

Surface Engineering

Restricted accessResearch articleFirst published December, 2004

Modelling plasma etching of AI thin films using neural network

B. Kim, K. Y. Park, D. Han

Surface Engineering

Restricted accessResearch articleFirst published January, 2008

Optimization of Principal-Component-Analysis-Applied in Situ Spectroscopy Data Using Neural Networks and Genetic Algorithms

Byungwhan Kim, Min Ji Kwon

Applied Spectroscopy

Restricted accessResearch articleFirst published October, 2006

Prediction of Surface Roughness Using X-Ray Photoelectron Spectroscopy and Neural Networks

Byungwhan Kim, Min-Geun Park

Applied Spectroscopy

Restricted accessResearch articleFirst published June, 2017

New simulation-based approach for the profile control in a process chamber: Fluid,thermal,and plasma profile

Dong Xiang, Huanxiong Xia, Wang Yang [...]

Proceedings of the Institution of Mechanical Engineers,Part E: Journal of Process Mechanical Engineering

Open accessResearch articleFirst published July, 2021

Optimisation of cutting parameters and surface deformation during thin steel sheets plasma processing using Taguchi approach

Adel Gani, William Ion, Erfu Yang

Advances in Mechanical Engineering

Search results

Articles (6)

Journals (0)

1-6 of 6 results for PLASMA ETCH PREDICTION

Sort by:

Relevance

Select all

Sort by:

Relevance

Restricted accessResearch articleFirst published February, 2004

Plasma Etch Prediction Using Genetic Algorithm Based Polynomial Neural Network

D.-W. Kim, B. Kim, I.-J. Shim [...]

Surface Engineering

Restricted accessResearch articleFirst published December, 2004

Modelling plasma etching of AI thin films using neural network

B. Kim, K. Y. Park, D. Han

Surface Engineering

Restricted accessResearch articleFirst published January, 2008

Optimization of Principal-Component-Analysis-Applied in Situ Spectroscopy Data Using Neural Networks and Genetic Algorithms

Byungwhan Kim, Min Ji Kwon

Applied Spectroscopy

Restricted accessResearch articleFirst published October, 2006

Prediction of Surface Roughness Using X-Ray Photoelectron Spectroscopy and Neural Networks

Byungwhan Kim, Min-Geun Park

Applied Spectroscopy

Restricted accessResearch articleFirst published June, 2017

New simulation-based approach for the profile control in a process chamber: Fluid,thermal,and plasma profile

Dong Xiang, Huanxiong Xia, Wang Yang [...]

Proceedings of the Institution of Mechanical Engineers,Part E: Journal of Process Mechanical Engineering

Open accessResearch articleFirst published July, 2021

Optimisation of cutting parameters and surface deformation during thin steel sheets plasma processing using Taguchi approach

Adel Gani, William Ion, Erfu Yang

Advances in Mechanical Engineering