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Research article

First published 2009-2

Line segment fabrication model analysis of near-field photolithography

Z-C Lin, C-B Yang

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2011-5

Curve fabrication model analysis of near-field photolithography

Z-C Lin, C-B Yang

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2011-5

Deadlock-free assignment of wafer processing in photolithography equipment - by using a CPN model

Xiaoyi He, Zhiming Wu

Transactions of the Institute of Measurement and Control

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Research article

First published 2002-07

Three-Ports Micro ER Valve for ER Suspension Fabricated by Photolithography

Masami Nakano, Teruo Katou, Akira Satou [...]

Journal of Intelligent Material Systems and Structures

Open access

Research article

First published 2020

ZnO Nanowire-Anchored Microfluidic Device With Herringbone Structure Fabricated by Maskless Photolithography

Dilshan Sooriyaarachchi, Shahrima Maharubin, George Z Tan

Biomedical Engineering and Computational Biology

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Research article

First published 2025

Enabling fast microfluidic chips fabrication: A practical guideline for microfluidics design and fabrication using photolithography for fast prototyping

Ziyang Zhang, Dan Nawrocki

Journal of Micromanufacturing

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Research article

First published 2010-10

Combining the Taguchi Method with an Artificial Neural Network to Construct a Prediction Model for Near-Field Photolithography Experiments

Z-C Lin, C-B Yang

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 1999-07

Photolithographic Synthesis of Intelligent Microgels

Yoshihiro Ito

Journal of Intelligent Material Systems and Structures

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Research article

First published 2013-11

Optimising lubricated friction coefficient by surface texturing

E de la Guerra Ochoa, J Echávarri Otero, E Chacón Tanarro [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 1986-5

Polymeric Materials for Semi-Conductor Processing Photolithographic Materials

Richard A. Pethrick

Progress in Rubber,Plastics and Recycling Technology

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