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Research article

First published 2001-12

Overview of Modern Lithography Techniques and a MEMS-Based Approach to High Throughput Rate Electron Beam Lithography

J. Geoffrey Chase, Bram W. Smith

Journal of Intelligent Material Systems and Structures

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Research article

First published 2004-6

Germanium nanowire transistors: A comparison of electrical contacts patterned by electron beam lithography and beam-assisted chemical vapour deposition

T Hanrath, B. A. Korgel

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2008-7

Correlation between Scattering Properties of Silver Particle Arrays and Fluorescence Enhancement

Henryk Szmacinski, Joseph R. Lakowicz, Jeffrey M. Catchmark [...]

Applied Spectroscopy

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Research article

First published 2006-6

Control of negative poly(methyl methacrylate) for the elaboration of planar electrodes separated by a sub-10 nm gap

J Grisolia, C Martin, L Ressier [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2007-9

Fabrication and optical characterization of nano-hole arrays in gold and gold/palladium films on glass

O M Piciu, M W Docter, M C van der Krogt [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2005-12

Nanofabrication of Densely Packed Metal—Polymer Arrays for Surface-Enhanced Raman Spectrometry

M. A. De Jesús, K. S. Giesfeldt, J. M. Oran [...]

Applied Spectroscopy

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Research article

First published 2013-11

Design and Characterization of Hybrid Morphology Nanoarrays as Plasmonic Raman Probes for Antimicrobial Detection

Jenifier Olavarría-Fullerton, Raymond A. Velez, Sabrina Wells [...]

Applied Spectroscopy

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Research article

First published 2010-9

Three-dimensional nanoimprint lithography using photocurable resins

J. Taniguchi, N. Unno, Y. Kamiya [...]

Plastics,Rubber and Composites: Macromolecular Engineering

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Research article

First published 2002-7

Application of a focused ion beam system to micro and nanoengineering

R. M. Langford, A. K. Petford-Long, M. Rommeswinkle [...]

Materials Science and Technology

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Research article

First published 2025-6

Fabrication and manipulation for key elements of magnetic-driven speed-reduction micro-motor

Ce Zhang, Shiqi Ma, Lizhong Xu

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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