Sage Journals: Discover world-class research

Retricted access

Research article

First published 2014-10

Atomically smooth gallium nitride surface prepared by chemical-mechanical polishing with different abrasives

Chunli Zou, Guoshun Pan, Xiaolei Shi [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

Retricted access

Research article

First published 2013-7

A three-dimensional transient model to predict interfacial phenomena during chemical mechanical polishing using computational fluid dynamics

Jeremiah N Mpagazehe, C Fred Higgs

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

Retricted access

Research article

First published 2014-10

Investigation on defect control for final chemical mechanical polishing of aluminum alloy

Guoshun Pan, Hua Gong, Zhonghua Gu [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

Retricted access

Research article

First published 2008-09

Treatment of Chemical Mechanical Polishing Wastewater for Water Reuse by Ultrafiltration and Reverse Osmosis Separation

Lain-Chuen Juang, Dyi-Hwa Tseng, He-Yin Lin [...]

Environmental Engineering Science

Retricted access

Research article

First published 2023-7

Modelling and optimization of surface roughness in chemical mechanical polishing based on DNN-GA

Bo Pan, Zengxu He, Jiang Guo [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

Retricted access

Research article

First published 2009-11

Investigation of domain related topography formation during chemical mechanical polishing of piezoelectric ceramic material

S. Uhlig, M. Nicolai, A. Schönecker [...]

Materials Science and Technology

Retricted access

Research article

First published 2008-6

An improved model considering elastic—plastic contact and partial hydrodynamic lubrication for chemical mechanical polishing

H-J Tsai, Y-R Jeng, P-Y Huang

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

Free access

Research article

First published 2011-12

Development and validation of a 200 mm wafer-scale finite element model of contact pressure distribution in chemical mechanical polishing

G Byrne, E Ahearne, P Timoney

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Retricted access

Research article

First published 2022-12

Mechanism of chemical and mechanical mutual promotion in photocatalysis-assisted chemical mechanical polishing for single-crystal SiC

Yan He, Zewei Yuan, Meiling Tang [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

Retricted access

Research article

First published 2014-10

Effects of mixed inhibitors in copper chemical mechanical polishing at a low down pressure

Hua Gong, Guoshun Pan, Zhonghua Gu [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

Search results