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Research article

First published 2017-4

Synthesis of c-axis oriented AlN thin films at room temperature

T. Tavsanoglu

Surface Engineering

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Research article

First published 2006-4

Process–microstructure–properties relationship during formation of AlN layers by physical vapour deposition

U. Figueroa, O. Salas, J. Oseguera

Surface Engineering

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Research article

First published 2009-10

Morphological investigation of aluminium nitride films on various substrates for MEMS applications

J. P. Kar, G. Bose, S. Tuli [...]

Surface Engineering

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Research article

First published 2016-4

Optical properties of cubic AlN films grown by sputtering

R. K. Choudhary, P. Mishra, R. C. Hubli

Surface Engineering

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Research article

First published 1995-11

Ion beam synthesis of aluminium nitride: Characterisation of thin AIN layers formed in microelectronics aluminium

L. Calvo-Barrio, A. Pérez-Rodríguez, A. Romano-Rodríguez [...]

Materials Science and Technology

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Research article

First published 2020-1

Characterisation of AlN nano thin films prepared by PLD

T. S. Hua, B. Zhu, R. G. Song

Surface Engineering

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Research article

First published 2020-9

Transverse piezoelectric constant of aluminium nitride films deposited on aluminium substrate by reactive magnetron sputtering

Daniele Desideri, Enrico Bernardo, Alain Jody Corso [...]

International Journal of Applied Electromagnetics and Mechanics

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Research article

First published 2008-11

Deposition process,microstructure and mechanical behaviours of RF magnetron sputtered (Ti,Al)N thin films

H. S. Yang, Y. H. Lu, X. He [...]

Materials Science and Technology

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Research article

First published 2009-8

Impact of post-deposition annealing on surface,bulk and interface properties of RF sputtered AlN films

J. P. Kar, S. Mukherjee, G. Bose [...]

Materials Science and Technology

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