Abstract
Cubic aluminium nitride (AlN) films were deposited on stainless steel substrate by reactive balanced magnetron sputtering. The film was studied for its optical properties using spectroscopic ellipsometry technique. A maximum band gap of 5·52±0·26 eV was obtained for the deposited film. The maximum value of refractive index measured in the wavelength range of 300–1100 nm was 1·9–2·15. Grazing incidence X-ray diffraction of the film showed formation of (200) oriented cubic AlN.
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