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1-2 of 2 results for 4H-SiC wafer

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Research article

First published 2021-9

Ultra-precision grinding of 4H-SiC wafer by PAV/PF composite sol-gel diamond wheel

Kaiping Feng, Tianchen Zhao, Binghai Lyu [...]

Advances in Mechanical Engineering

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Research article

First published 2020-3

Yan He, Zewei Yuan, Kai Cheng [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology