Abstract
A Zernike-type phase contrast hard X-ray microscope was constructed at Photon Factory (PF) BL3C2. The spatial resolution of better than 200 nm was obtained with the zone plate of the outermost zone width of 50 nm at the X-ray energy of 5 keV. A pinhole-type phase plate was made of 3μm thick aluminum foil. Transparent biological specimens could be observed. A phase contrast three dimensional image was obtained using a tomographic technique.
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