X-Ray Study of State-of-the-Art Small (d-Spacing W/B 4 C Multilayers

Abstract

Two small d-spacing W/B₄C multilayers have been studied at three different x-ray energies CuKα₁, AlKα, and FeLα. Measurements of total reflection, specular and mosaic Bragg reflection, and high resolution studies were made at Cu Kα₁. Multilayer parameters are deduced from the data and the perfection of the multilayer structure is evaluated by Comparison with model Calculations.