Piezo driver for piezoelectric bimorph actuators is the key component for micro-positioning application. Hysteresis nonlinearity of piezoelectric bimorph actuators limits the performance of micro-positioning systems. A novel piezo driver was developed with Prandtl-Ishlinskii (P-I) model and correction network. The combination of P-I model and correction network can describe the rate-dependent hysteresis. Experiments were performed to validate the proposed piezo driver. The results show that the piezo driver can compensate the hysteresis of the piezoelectric bimorph actuator in the frequency range of 0.1 Hz to 10 Hz, and the accuracy of micro-positioning have been greatly improved.
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