Abstract
Tungsten-containing diamond-like carbon (W-DLC) film was investigated with the aim of strain sensor application. Three samples deposited under different methane flow rates were investigated. The strain dependence of normalized resistance has a linear dependence and the gauge factor has positive and negative values. The sensitivity and temperature coefficient of resistance(TCR) increase with an increase in the methane flow rate. However, from a practical point of view the sample with the lowest gauge factor is most appropriate for a stain sensor because it has the smallest TCR of the three samples.
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