Abstract
We describe a possible accelerator system to provide an ion beam of extremely low emittance and low current. It is possible to reduce the beam size down to nanometer order keeping the beam divergence of microradian order. It can be used as a nano beam source for single ion implantation onto semiconductors and for the systematic study of radiation damage in bio-molecules and semiconductors. The whole system basically has a radio-frequency quadrupole configuration with a Paul ion trap as injector. Ions are confined and cooled in the trap section, and then accelerated to∼ MeV through an RFQ linac. Design speculation is made assuming acceleration of
Get full access to this article
View all access options for this article.