Abstract
A computer simulation program based on a finite element interaction analysis method is developed for the design of electrostatic actuators. The simulation program consists of finite element analysis parts for the hyperelastic structure and electrostatic field, and the interaction analysis part. Because the actuator utilizes structural buckling so as to obtain a larger horizontal stroke, the interaction analysis must take the postbuckling problem into consideration. Therefore, the arc-length method is incorporated into the program. It is demonstrated through a numerical example that satisfactory motion of the actuator can be realized by virtue of structural buckling.
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