Abstract
A novel piezo-driven rotary inchworm actuator which features with simple structure and large output torque is presented. To simplify the structure of the actuator and hence to improve its assembly accuracy, a multi-functional mechanism that has both driving and clamping capabilities was designed. The mechanical property of the multi-functional mechanism is analyzed in detail and its working principle is also described. A prototype of the proposed actuator is fabricated and several performance tests are implemented. The experimental results show that the actuator can achieve the maximum output torque of 112 Nmm and the maximum rotational speed of 43.5 mrad/s under the driving frequency of 300 Hz.
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