Abstract
The quartz resonator can be used as a force-sensitive element for sensors. The resonance energy distribution of thickness-shear quartz crystal is derived and calculated using the energy trapping theory. To reduce temperature and other interference factors as well as improve force-sensitivity, a multi-electrode force-sensitive resonator cluster is designed based on resonance energy distribution results. The output frequency signals of the resonator cluster are subtracted from each other to form beat frequency signals to suppress the temperature and other interference factors using the common mode rejection principle. Next, the beat frequency signals are superimposed to improve the overall force-sensitivity of the quartz crystal resonator cluster. The experimental results show that the temperature characteristics of the quartz resonator cluster are better than the traditional single electrode resonator and that the frequency stability reaches 10
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