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Abstract

We propose using a circular driving electrode on a conventional thin film bulk acoustic wave resonator with a square piezoelectric film on a square ground electrode and a square dielectric layer. The circular driving electrode has the advantage of avoiding the electric field concentration at the corners of a square driving electrode and the related negative effects. A circular driving electrode is also perfectly consistent with the in-plane material isotropy of common thin film resonator materials such as AlN and ZnO. A theoretical analysis on the proposed resonator was performed to obtain the basic vibration characteristics including resonant frequencies and mode shapes.

Keywords

Piezoelectric plate resonator vibration

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References

Grudkowski

T.W.

Black

J.F.

Reeder

T.M.

Cullen

D.E.

and Wagner

R.A.

, Fundamental-mode VHF/UHF minature acoustic resonator and filters on silicon, Applied Physics Letters 37 (1980), 993–995.

Lakin

K.M.

and Wang

J.S.

, Acoustic wave bulk composite resonator, Applied Physics Letters 38 (1981), 125–127.

Nakamura

Sasaki

and Shimizu

, ZnO/SiO2 diaphragm composite resonator on a silicon wafer, Electronics Letters 17 (1981), 507–509.

Lakin

K.M.

Wang

Kline

Landin

Chin

and Hunt

, Thin film resonators and Filters, Proceedings of the 1982 IEEE Ultrasonics Symposium, San Diego, CA, 1982, pp. 466–473.

Ruby

Bradley

Larson

J.D.

and Oshmyansky

, PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs), Electronics Letters 35 (1999), 794–795.

Lakin

K.M.

, A review of thin film resonator technology, IEEE Microwave Magazine 4 (2003), 61–67.

Martin

Jan

M.-E.

Rey-Mermet

Belgacem

Cantoni

and Muralt

, Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 53 (2006), 1339–1343.

Yanagitani

Mishima

Matsukawa

and Yatanabe

, Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axis lie in the substrate plane, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 54 (2007), 701–704.

J.K.

Xian

Wang

and Yang

J.S.

, Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes, Ultrasonics 49 (2009), 149–152.

10.

Qin

L.F.

Chen

Q.M.

Cheng

H.B.

and Wang

Q.M.

, Analytical study of dual-mode thin film bulk acoustic resonators (FBARs) based on ZnO and AlN films with tilted c-axis orientation, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control57 (2010), 1840–1853.

11.

Yanagitani

Morisato

Takayanagi

Matsukawa

and Watanabe

, C-axis zig-zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 58 (2011), 1062–1068.

12.

Zhang

H.F.

and Bao

Y.Y.

, Sensitivity analysis of multi-layered C-axis inclined zigzag zinc oxide thin-film resonators as viscosity sensors, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 61 (2014), 525–534.

13.

Pang

Zhang

and Kim

E.S.

, Micromachined acoustic wave resonator isolated from substrate, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 52 (2005), 1239–1246.

14.

Link

Schreiter

Weber

Primig

Pitzer

and Cabl

, Solidly mounted ZnO shear mode film bulk acoustic wave resonators for sensing applications in liquids, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 53 (2006), 492–496.

15.

Tiersten

H.F.

and Stevens

D.S.

, An analysis of thickness-extensional trapped energy resonant device structures with rectangular electrodes in the piezoelectric thin film on silicon configuration, Journal of Applied Physics 54 (1983), 5893–5910.

16.

Yang

J.S.

Xue

and Hu

Y.T.

, Finite element analysis of stress field concentration near the edge of an electrode, Ferroelectrics Letters Section 34 (2007), 108–112.

17.

Kumar

Singh

Kumari

Singh

and Akhtar

, Effect of shapes and electrode material on figure of merit (FOM) of BAW resonator, National Conference on Thermophysical Properties, Yokohama, 2016, pp. 020045.

18.

Zhao

Z.N.

Qian

Z.H.

Wang

and Yang

J.S.

, Energy trapping of thickness-extensional modes in thin film bulk acoustic wave resonators, Journal of Mechanical Science and Technology 29 (2015), 2767–2773.

19.

Gong

Han

Shang

Xiong

Duan

and Sekimoto

, Two-dimensional analysis of spurious modes in aluminum nitride film resonators, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 54 (2007), 1171–1176.

20.

Meltaus

Pensala

and Kokkonen

, Parametric study of laterally acoustically coupled bulk acoustic wave filters, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control59 (2012), 2742–2751.

21.

Zhao

Z.N.

Qian

Z.H.

and Wang

, Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters, AIP Advances 6 (2016), 993–995.

22.

Zhao

Z.N.

Qian

Z.H.

and Wang

, Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes, AIP Advances 6 (2016), 1735–1739.

23.

Liu

J.K.

Wang

and Yang

J.S.

, Long thickness-extensional waves in thin film bulk acoustic wave filters affected by interdigital electrodes, Ultrasonics 75 (2017), 226–232.

24.

Auld

B.A.

, Acoustic Fields and Waves in Solids, John Willey and Sons, New York, 1973, pp. 357–382.

25.

Yang

J.S.

and Tiersten

H.F.

, Effects of free edge on the vibration characteristics of a contoured, beveled quartz resonator, International Journal of Applied Electromagnetics and Mechanics 46 (2014), 649–661.

An analysis of an unbounded thin film bulk acoustic wave piezoelectric resonator with a circular driving electrode

Abstract

Keywords

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