Abstract
To develop magnetic sensors operating at high temperatures, we evaluated the magnetic parameters of several soft magnetic materials. Although NiFe is a most competent candidate for a magnetic field sensor at room temperature, it is ineffective at higher temperature (above 400°C). On the other hand, Fe based alloy can be expected as a candidate material having a high permeability at higher temperatures due to high Curie temperature. Especially, FeSi steel is most expected to be utilized to a magnetic sensor operating at high temperatures.
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