Diagnostics in a High-Flow-Rate (>6 L min −1 ) Helium Capacitively Coupled Microwave Plasma: Aqueous versus Organic Solution

Abstract

A helium capacitively coupled microwave plasma (CMP) with a high plasma gas flow rate (>6 L min⁻¹) is described. Plasma gas flow rates above 6–8 L min⁻¹ produce a cylindrical-shaped plasma. Diagnostic studies were performed. Electronic excitation (T_exc), rotational (T_rot), and ionization-recombination (T_ion) temperatures were determined, along with the electron number density (n_e). T_exc was calculated from the slope of the Boltzmann plot with the use of Fe as the thermometric species. Values for T_exc in aqueous and organic solution were 3430 and 3450 K, respectively. T_rot determined with the use of both OH and N₂⁺. With OH, T_rot values were 1620 and 1660 K for aqueous and organic solutions, respectively. If no solution was introduced, a T_rot value of 2350 K was determined with N₂⁺. N₂⁺ also gave T_rot values of 1900 and 1930 K with aqueous and organic solutions, respectively. The T_ion values were 6220 and 5610 K with the use Cd and Mg, respectively. The n_e value was on the order of 4 × 10¹⁴ cm⁻³. Background spectra and limits of detection are also presented.

Keywords

Emission spectroscopy Microwave plasma Temperature Electron number density

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