Abstract
The effects of changes in experimental parameters on the plasma emission spectra produced during excimer laser ablation of YBa2Cu3O7 were investigated. Emission from YO is observed for low-incident laser fluences, but is absent for fluences at or above those used for thin film deposition by laser ablation. Excitation within the plasma appears to be primarily due to electron impact. The effects of incident laser fluence and ambient gas pressure on the plasma emission are distinct enough to allow adjustment of either parameter based on the observed change in the emission spectrum. Therefore, optical emission spectroscopy is well suited as a technique for in situ monitoring of the deposition of thin films by laser ablation.
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