The purpose of this paper is to describe two methods for composition determination of superconducting thin films: (1) the multiple standards method, in which a set of filter disks is used, and (2) the fundamental parameters method, in which only one standard is used. The two methods are convenient and easy to apply. The disk standards can be prepared readily. It is not necessary to destroy the samples to be determined. The methods are applied to superconducting thin films of an yttrium series; the principle of these methods can be applied to the films of other series as well. The methods can coordinate the process of scientific research and production quickly.
