A method was developed for the analysis of trimethylaluminum (TMA) by inductively coupled plasma-atomic emission spectrometry (ICP-AES). TMA was decomposed with 95% ethanol, and the aqueous solution of the decomposition product was used for the determination of six trace elements (Cu, Fe, Ga, Mg, Si, and Zn). Aluminum also was determined after dilution of the aqueous solution. The reproducibility of the overall decomposition and measurement procedures was <15%. Except for gallium, the limits of detection were <0.5 μg/g of TMA.
