A sample introduction system constructed of materials completely resistant to HF was developed for analysis of HF-containing samples. A machined graphite injector tube, polytetrafluoroethylene (PTFE) spray chamber, and cross flow nebulizer containing PTFE capillaries were employed. The arrangement is completely compatible with commercial ICP systems and can be interchanged readily. The nebulizer efficiency and memory effect were studied and compared with a conventional system. Analysis of silicon in commercial HF acid was performed.
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